Qhib lub zog ntawm cov ntaub ntawv txiav tshiab: Trimethylaluminum thiab trimethylgallium tsav kev tsim kho tshiab hauv kev lag luam.
Hauv nthwv dej ntawm kev loj hlob sai ntawm kev tsim khoom thoob ntiaj teb thiab kev lag luam hluav taws xob, trimethylaluminum (TMA, Al (CH3)3) thiab trimethylgallium (TMG, Ga (CH3)3) ua cov khoom siv hlau tseem ceeb (MO qhov chaw) tau dhau los ua lub hauv paus ntawm kev tsim kho tshiab hauv cov teb ntawm catalysis, semiconductors, photovoltaics thiab LEDs nrog lawv cov khoom siv tshuaj zoo heev thiab cov nqi thov tsis hloov pauv. Nrog nws txoj kev txhim kho tas li ntawm kev siv tshuab thiab kev xa khoom ruaj khov thiab ua haujlwm tau zoo, Tuam Tshoj tab tom dhau los ua lub roob siab rau kev muab khoom thoob ntiaj teb ntawm trimethylaluminum thiab trimethylgallium.
Lub hauv paus ntawm catalysis: qhov kev pab cuam zoo tshaj plaws ntawmtrimethylaluminum
Txij li thaum Ziegler-Natta catalytic technology yug los, cov organoaluminum compounds tau dhau los ua lub hauv paus tseem ceeb rau kev tsim cov polyolefins (xws li polyethylene thiab polypropylene). Ntawm lawv, methylaluminoxane (MAO), uas tau los ntawm cov khoom siv trimethylaluminum uas muaj kev ntshiab siab, ua tus neeg sib koom ua ke tseem ceeb, ua kom muaj ntau yam catalysts hlau hloov pauv zoo thiab tsav lub ntiaj teb cov txheej txheem polymerization loj heev. Qhov kev ntshiab thiab kev ua haujlwm ntawm trimethylaluminum ncaj qha txiav txim siab qhov ua tau zoo ntawm lub kaw lus catalytic thiab qhov zoo ntawm cov polymer kawg.
Cov khoom siv tseem ceeb rau kev tsim khoom semiconductor thiab photovoltaic
Hauv kev tsim cov khoom siv semiconductor chip, trimethylaluminum yog qhov tseem ceeb rau cov txhuas. Nws siv cov txheej txheem chemical vapor deposition (CVD) lossis atomic layer deposition (ALD) kom tso cov khoom ua haujlwm siab.txhuas oxide (Al2O3))Cov yeeb yaj kiab dielectric siab tas li (high-k) rau cov rooj vag transistor siab heev thiab cov hlwb nco. Cov kev cai huv rau trimethylaluminum yog qhov nruj heev, nrog rau kev saib xyuas tshwj xeeb rau cov ntsiab lus ntawm cov hlau tsis huv, cov pa oxygen uas muaj cov khoom tsis huv, thiab cov khoom tsis huv organic kom ntseeg tau tias cov khoom siv hluav taws xob zoo heev thiab kev ntseeg tau ntawm cov yeeb yaj kiab.
Tib lub sijhawm, trimethylaluminum yog qhov ua ntej zoo tshaj plaws rau kev loj hlob ntawm cov khoom siv semiconductor uas muaj txhuas (xws li AlAs, AlN, AlP, AlSb, AlGaAs, AlGaN, AlInGaP, AlInGaN, thiab lwm yam) los ntawm cov hlau organic vapor theem epitaxy (MOVPE) thev naus laus zis. Cov ntaub ntawv no tsim lub hauv paus ntawm kev sib txuas lus ceev ceev, hluav taws xob hluav taws xob, thiab cov khoom siv ultraviolet optoelectronic tob.
Hauv kev lag luam photovoltaic, trimethylaluminum kuj ua lub luag haujlwm tseem ceeb. Los ntawm cov txheej txheem plasma-enhanced chemical vapor deposition (PECVD) lossis ALD, trimethylaluminum yog siv los tsim cov txheej txheem passivation zoo aluminium oxide (Al2O3). Cov txheej txheem passivation no tuaj yeem txo qhov kev poob recombination ntawm qhov chaw ntawm crystalline silicon solar cells, yog li txhim kho qhov kev hloov pauv ntawm cov cell. Nws yog ib qho ntawm cov txheej txheem tseem ceeb hauv kev tsim cov cell hnub ci ua haujlwm siab.
Teeb pom kev yav tom ntej: LEDs thiab cov ntaub ntawv optoelectronic siab heev
Kev lag luam LED uas tab tom vam meej yog nyob ntawm trimethylaluminum thiab trimethylgallium heev. Hauv kev loj hlob ntawm LED epitaxial (MOVPE):
* Trimethylaluminum yog ib qho tseem ceeb ua ntej rau kev loj hlob ntawm cov txheej semiconductor epitaxial uas muaj txhuas xws li txhuas gallium nitride (AlGaN), uas yog siv los tsim cov LEDs thiab lasers uas muaj kev ua haujlwm siab ultraviolet. Nws kuj tseem siv los tso Al2O3 lossis AlN passivation txheej kom txhim kho kev ua haujlwm ntawm lub teeb thiab kev ntseeg siab ntawm cov khoom siv.
*Trimethylgallium (TMG)yog qhov tseem ceeb tshaj plaws thiab laus tshaj plaws ntawm gallium hauv cov txheej txheem MOVPE. Nws yog lub hauv paus tseem ceeb rau kev npaj ntau hom gallium-muaj cov khoom sib xyaw semiconductors, suav nrog:
* Gallium Nitride (GaN): Ib yam khoom siv tseem ceeb rau cov LED xiav thiab dawb, lasers (LDs), thiab cov khoom siv hluav taws xob muaj zog heev.
* Gallium arsenide (GaAs): Siv dav hauv cov khoom siv hluav taws xob ceev ceev, cov khoom siv zaus xov tooj cua, cov roj teeb hnub ci zoo heev, thiab cov khoom siv optoelectronic ze-infrared.
* Gallium phosphide (GaP) thiab gallium antimonide (GaSb): Lawv tseem ceeb heev rau cov teeb liab, daj, thiab ntsuab LEDs, photodetectors, thiab lwm yam.
* Tooj Liab Indium Gallium Selenide (CIGS): cov khoom siv txheej txheem nqus lub teeb uas siv los tsim cov roj teeb nyias nyias ua haujlwm tau zoo.
Qhov purity thiab stability ntawm trimethylgallium ncaj qha txiav txim siab qhov zoo ntawm crystal thiab hluav taws xob / optical khoom ntawm epitaxial txheej, uas thaum kawg cuam tshuam rau qhov kaj, wavelength sib xws, thiab lub neej ntawm LED. Trimethylgallium kuj tseem siv los npaj cov ntaub ntawv tseem ceeb nyias zaj duab xis xws li GaAs, GaN, thiab GaP, pabcuam microelectronics thiab cov khoom siv high-frequency.
Tuam Tshoj cov khoom xa tuaj: kev lees paub zoo, kev ruaj khov, thiab kev ua haujlwm zoo
Tuam Tshoj tau ua tiav kev vam meej tseem ceeb hauv kev lag luam ntawm cov pa roj hluav taws xob tshwj xeeb thiab MO, thiab tau ua pov thawj tias muaj kev sib tw zoo hauv kev muab trimethylaluminum thiab trimethylgallium:
1. Cov txheej txheem ntxuav kom huv si: Cov tuam txhab ua lag luam hauv tsev ua tau zoo heev hauv kev ua kom huv si, kev nqus dej, kev ntxuav kom huv si kub qis thiab lwm yam thev naus laus zis, thiab tuaj yeem tsim cov khoom siv trimethylaluminum thiab trimethylgallium uas muaj purity siab heev ntawm 6N (99.9999%) thiab siab dua, tswj hwm cov hlau tsis huv (xws li Na, K, Fe, Cu, Zn), cov pa oxygen uas muaj impurities (xws li cov hydrocarbons uas muaj oxygen) thiab cov organic impurities (xws li ethylaluminum, dimethylaluminum hydride), thiab ua tau raws li cov kev cai nruj ntawm kev loj hlob ntawm semiconductor thiab LED epitaxial.
2. Kev muab khoom loj thiab ruaj khov: Kev txhawb nqa cov saw hlau kev lag luam tag nrho thiab kev nthuav dav ntawm lub peev xwm tsim khoom tas li ua kom muaj kev muab khoom loj, ruaj khov, thiab txhim khu kev qha ntawm trimethylaluminum thiab trimethylgallium rau kev lag luam thoob ntiaj teb, tiv taus kev pheej hmoo ntawm cov saw hlau.
3. Cov txiaj ntsig ntawm tus nqi thiab kev ua haujlwm tau zoo: Kev tsim khoom hauv zos txo cov nqi tag nrho (xws li kev xa khoom, cov nqi se, thiab lwm yam) thaum muab kev txhawb nqa thiab kev pabcuam hauv zos uas yoog tau thiab teb tau zoo dua.
4. Kev tsim kho tshiab tas mus li: Cov tuam txhab Suav txuas ntxiv nqis peev rau kev tshawb fawb thiab kev txhim kho, txuas ntxiv txhim kho cov txheej txheem tsim khoom ntawm trimethylaluminum thiab trimethylgallium, txhim kho cov khoom zoo thiab kev ua haujlwm ntawm daim ntawv thov, thiab nquag tsim cov lus qhia tshiab ntawm cov khoom uas ua tau raws li qhov xav tau ntawm cov thev naus laus zis tom ntej (xws li Micro-LED, cov semiconductors siab dua, thiab cov roj teeb hnub ci ua haujlwm siab).
Xaus lus
Raws li "cov noob khoom siv" ntawm cov lag luam niaj hnub high-tech, trimethylaluminum thiab trimethylgallium ua lub luag haujlwm tseem ceeb hauv kev lag luam catalytic polymerization, semiconductor chips, high-efficiency photovoltaics, thiab advanced optoelectronics (LED / LD). Kev xaiv trimethylaluminum thiab trimethylgallium los ntawm Tuam Tshoj tsis yog tsuas yog xaiv cov khoom lag luam ultra-high purity uas ua tau raws li cov qauv saum toj kawg nkaus hauv ntiaj teb, tab sis kuj xaiv tus khub koom tes nrog kev lav phib xaub muaj peev xwm tsim khoom, kev tsim kho tshiab tas mus li, thiab kev pabcuam teb tau zoo. Txais yuav trimethylaluminum thiab trimethylgallium ua nyob rau hauv Tuam Tshoj, ua ke txhawb kev txhim kho kev lag luam, thiab tsav tsheb yav tom ntej technological frontier!