Trimethylaluminum (TMAI)
Trimethylalumane (TMAI)
| Cov lus txhais | Trimethylaluminum, Aluminium Trimethyl, Aluminium Trimethanide, TMA, TMAL, AlMe3, Ziegler-Natta Catalyst, Trimethyl-, Trimethylalane. |
| Tus lej Cas | 75-24-1 |
| Cov mis tshuaj | C6H18Al2 |
| Qhov hnyav ntawm cov molar | 144.17 g/mol, 72.09 g/mol (C3H9Al) |
| Qhov tsos | kua tsis muaj xim |
| Qhov Ceev | 0.752 g/cm3 |
| Qhov kub yaj | 15℃ (59 ℉; 288K) |
| Kub taw tes | 125--130 ℃ (257--266 ℉, 398--403K) |
| Kev yaj hauv dej | Cov tshuaj tiv thaiv |
| Lub zog ua pa | 1.2 kPa (20 ℃), 9.24 kPa (60 ℃) |
| Qhov viscosity | 1.12 cP (20 ℃), 0.9 cP (30 ℃) |
Trimethylaluminum (TMAl), ua ib qho chaw hlau-organic (MO), siv dav hauv kev lag luam semiconductor thiab ua haujlwm ua tus thawj coj tseem ceeb rau atomic layer deposition (ALD), chemical vapor deposition (CVD), thiab metal-organic chemical vapor deposition (MOCVD). Nws yog siv los npaj cov yeeb yaj kiab uas muaj cov txhuas ntshiab, xws li txhuas oxide thiab txhuas nitride. Tsis tas li ntawd, TMAl pom kev siv dav dav ua tus catalyst thiab nws tus neeg sawv cev pabcuam hauv cov organic synthesis thiab polymerization reactions.
Trimethylaluminum (TMAI) ua haujlwm ua tus precursor rau aluminium oxide deposition thiab ua haujlwm ua Ziegler-Natta catalyst. Nws tseem yog tus precursor txhuas feem ntau siv hauv kev tsim cov hlau-organic vapor-phase epitaxy (MOVPE). Ntxiv mus, TMAI ua haujlwm ua tus neeg sawv cev methylation thiab feem ntau tso tawm los ntawm cov foob pob hluav taws ua tus tracer rau kev kawm cov qauv cua sab saud.
Cov lus qhia txog kev lag luam ntawm 99.9999% Trimethylaluminum - Silicon tsawg thiab cov pa oxygen tsawg (6N TAMI-Low Si thiab Low Ox)
| Khoom | Qhov tshwm sim | Cov Lus Qhia Tshwj Xeeb | Khoom | Qhov tshwm sim | Cov Lus Qhia Tshwj Xeeb | Khoom | Qhov tshwm sim | Cov Lus Qhia Tshwj Xeeb |
| Ag | ND | <0.03 | Cr | ND | <0.02 | S | ND | <0.05 |
| As | ND | <0.03 | Cu | ND | <0.02 | Sb | ND | <0.05 |
| Au | ND | <0.02 | Fe | ND | <0.04 | Si | ND | ≤0.003 |
| B | ND | <0.03 | Ge | ND | <0.05 | Sn | ND | <0.05 |
| Ba | ND | <0.02 | Hg | ND | <0.03 | Sr | ND | <0.03 |
| Be | ND | <0.02 | La | ND | <0.02 | Ti | ND | <0.05 |
| Bi | ND | <0.03 | Mg | ND | <0.02 | V | ND | <0.03 |
| Ca | ND | <0.03 | Mn | ND | <0.03 | Zn | ND | <0.05 |
| Cd | ND | <0.02 | Ni | ND | <0.03 | |||
| Co | ND | <0.02 | Pb | ND | <0.03 |
Lus Cim:
Qhov tseem ceeb tshaj plaws yog tus nqi PPM los ntawm qhov hnyav ntawm cov hlau, thiab ND = tsis pom
Txoj Kev Tshawb Fawb: ICP-OES/ICP-MS
Cov txiaj ntsig FT-NMR (LOD rau FT-NMR cov organic thiab cov pa oxygenated impurity yog 0.1ppm):
Kev lav pa oxygen <0.2 ppm (Ntsuas hauv FT-NMR)
1. Tsis muaj cov organic impu rities pom
2. Tsis muaj cov pa oxygenated impurities pom
Trimethylaluminum (TMAI) siv rau dab tsi?
Trimethylaluminum (TMA)- Cov Ntawv Thov thiab Siv
Trimethylaluminum (TMA) yog ib qho khoom sib xyaw ua los ntawm cov organoaluminum uas muaj purity siab heev thiab yog ib qho tseem ceeb hauv kev tsim khoom siv niaj hnub no. Nws cov reactivity thiab vapor pressure ua rau nws yog cov khoom siv xaiv rau kev tso cov yeeb yaj kiab uas muaj txhuas hauv cov khoom siv hluav taws xob thiab cov thev naus laus zis hluav taws xob, thiab yog ib qho tseem ceeb hauv kev tsim polyolefin.
Peb lub TMA yog tsim los rau cov qauv kev huv huv tshaj plaws, nrog kev tswj hwm nruj ntawm cov khoom tsis huv, cov pa oxygenated, thiab cov organic kom ntseeg tau tias muaj kev ua tau zoo tshaj plaws hauv koj cov ntawv thov uas xav tau tshaj plaws.
Cov Ntawv Thov Tseem Ceeb thiab Kev Lag Luam:
1. Kev Tsim Khoom Siv Semiconductor & Microelectronics
Hauv kev lag luam semiconductor, TMA yog qhov tseem ceeb rau kev tso cov yeeb yaj kiab nyias nrog qhov tseeb ntawm atomic.
* High-k Dielectrics: Siv rau hauv Atomic Layer Deposition (ALD) thiab Chemical Vapor Deposition (CVD) los cog cov yeeb yaj kiab nyias nyias ntawm txhuas oxide (Al₂O₃), uas ua haujlwm ua cov dielectrics rooj vag siab hauv cov transistors thiab cov khoom siv nco.
* Cov Khoom Siv Sib Xyaws Ua Ib Ke: Qhov chaw zoo tshaj plaws rau cov khoom siv txhuas hauv Metalorganic Vapor Phase Epitaxy (MOVPE) rau kev cog cov khoom siv sib xyaw ua ke III-V uas muaj kev ua tau zoo. Cov ntaub ntawv no yog qhov tseem ceeb rau:
* Cov Khoom Siv Hluav Taws Xob Zaus Siab: (piv txwv li, AlGaAs, AlInGaP)
* Optoelectronics: (piv txwv li, AlGaN, AlInGaN)
2. Lub Zog Huv Si & Photovoltaics
TMA ua rau muaj kev ua haujlwm zoo dua thiab ruaj khov dua hauv cov thev naus laus zis hnub ci.
* Cov Txheej Txheem Passivation Nto: Tso los ntawm ALD lossis Plasma-Enhanced CVD (PECVD), cov yeeb yaj kiab txhuas oxide (Al₂O₃) los ntawm TMA muab qhov zoo tshaj plaws ntawm kev passivation nto rau cov hlwb hnub ci crystalline silicon. Qhov no txo qis kev sib xyaw ua ke ntawm tus neeg nqa khoom, ua rau muaj kev nce qib tseem ceeb hauv kev hloov pauv ntawm tes thiab kev ruaj khov mus sij hawm ntev.
3. Teeb Pom Kev Zoo Tshaj Plaws & Zaub (LED)
Kev tsim cov LEDs uas ci ntsa iab thiab txuag hluav taws xob vam khom TMA uas muaj kev ntshiab siab.
* LED Epitaxy: Ua haujlwm ua tus thawj coj txhuas hauv MOVPE reactors kom loj hlob cov khaubncaws sab nraud povtseg (piv txwv li, AlGaN) hauv xiav, ntsuab, thiab ultraviolet LEDs.
* Kev Siv Khoom Siv Passivation: Siv los tso cov yeeb yaj kiab tiv thaiv aluminium oxide lossis aluminium nitride uas txhim kho kev rho tawm optical thiab ua kom lub neej ua haujlwm ntawm LED cov khoom siv ntev dua.
4. Kev Lag Luam Catalysis & Polymer Production
TMA qhov tseem ceeb hauv kev lag luam yog los ntawm nws lub luag haujlwm hauv catalysis.
* Polyolefin Catalysis: Nws yog cov khoom siv pib tseem ceeb rau kev tsim cov Methylaluminoxane (MAO), uas yog ib qho tseem ceeb co-catalyst hauv Ziegler-Natta thiab metallocene catalyst systems. Cov kab ke no tsim feem ntau ntawm lub ntiaj teb polyethylene thiab polypropylene plastics.
Cov Yam Ntxwv Tseem Ceeb & Cov Txiaj Ntsig:
* Ultra-High Purity: Tswj hwm kom zoo kom txo cov khoom tsis huv uas ua rau kev ua haujlwm hluav taws xob thiab kev ua haujlwm catalytic poob qis.
* Cov Khoom Siv Zoo Tshaj Plaws: Muaj kev hloov pauv zoo heev, kev ruaj khov thermal, thiab cov yam ntxwv huv si rau kev tso zaj duab xis zoo.
* Tus Qauv Kev Lag Luam: Qhov chaw tsim khoom txhuas uas tau tsim tsa thiab ntseeg siab rau MOVPE, ALD, thiab CVD cov txheej txheem thoob plaws ntiaj teb R&D thiab cov chaw tsim khoom.
* Lub Hauv Paus Rau Yas: Ib qho khoom siv tseem ceeb uas ua rau muaj peev xwm tsim cov polyolefin polymers uas siv tau ntau yam thiab tseem ceeb.
Lus Ceeb Toom: Trimethylaluminum yog ib yam khoom uas pyrophoric thiab rhiab heev rau dej noo uas xav tau kev tuav thiab kev nyab xeeb tshwj xeeb. Cov ntaub ntawv muab yog rau kev piav qhia xwb. Nws yog lub luag haujlwm ntawm tus neeg siv los tuav cov khoom no raws li txhua cov lus qhia kev nyab xeeb thiab txiav txim siab nws qhov haum rau ib daim ntawv thov tshwj xeeb.
