Ho notlolla matla a thepa ea sejoale-joale: Trimethylaluminium le trimethylgallium li susumetsa boqapi ba indasteri.
Leqhubung la ntshetsopele e potlakileng ya diindasteri tsa tlhahiso le tsa elektroniki tsa maemo a hodimo lefatsheng, trimethylaluminum (TMA, Al(CH3)3) le trimethylgallium (TMG, Ga(CH3)3) jwalo ka metswako ya mantlha ya tshepe ya tlhaho (mehlodi ya MO) di fetoha motheo wa boqapi masimong a catalysis, di-semiconductor, di-photovoltaic le di-LED ka thepa ya tsona e babatsehang ya dikhemikhale le boleng ba tshebediso bo ke keng ba nkeloa sebaka. Ka matla a yona a tekheniki a ntlafalang ka ho tswelang pele le ketane ya phepelo e tsitsitseng le e sebetsang hantle, Chaena e fetoha sebaka se phahameng sa mawa bakeng sa phepelo ya lefatshe ya trimethylaluminum le trimethylgallium.
Lejoe la motheo la catalysis: monehelo o ikhethang oatrimethylaluminum
Ho tloha tsoalong ea theknoloji ea li-catalytic ea Ziegler-Natta, metsoako ea organoaluminium e fetohile matla a mantlha a susumetsang tlhahiso ea li-polyolefin (tse kang polyethylene le polypropylene). Har'a tsona, methylaluminoxane (MAO), e nkiloeng ho trimethylaluminum e hloekileng haholo, e le sesebelisoa sa bohlokoa sa li-catalyst, e kenya tšebetsong li-catalyst tse fapaneng tsa tšepe ea phetoho ka katleho 'me e khanna ts'ebetso e kholo ea polymerization lefatšeng. Bohloeki le ts'ebetso ea trimethylaluminum ka kotloloho li khetholla katleho ea sistimi ea li-catalytic le boleng ba polymer ea ho qetela.
Li-precursors tsa mantlha bakeng sa tlhahiso ea semiconductor le photovoltaic
Lefapheng la tlhahiso ea li-chip tsa semiconductor, trimethylaluminium ke mohloli oa aluminium o ke keng oa hlokoa. E sebelisa lits'ebetso tsa chemical vapor deposition (CVD) kapa atomic layer deposition (ALD) ho beha ts'ebetso e phahameng ka nepo.aluminium oxide (Al2O3))Lifilimi tse phahameng tsa dielectric tse sa fetoheng (high-k) bakeng sa liheke tse tsoetseng pele tsa transistor le lisele tsa memori. Litlhoko tsa bohloeki ba trimethylaluminium li thata haholo, ka tlhokomelo e khethehileng ho litaba tsa litšila tsa tšepe, litšila tse nang le oksijene, le litšila tsa tlhaho ho netefatsa thepa e ntle ea motlakase le ts'epo ea filimi.
Ka nako e ts'oanang, trimethylaluminum ke selelekela se khethiloeng bakeng sa kholo ea li-semiconductor tse nang le aluminium (tse kang AlAs, AlN, AlP, AlSb, AlGaAs, AlGaN, AlInGaP, AlInGaN, jj.) ka theknoloji ea mouoane oa organic organic phase epitaxy (MOVPE). Lisebelisoa tsena li theha motheo oa puisano e potlakileng, lisebelisoa tsa elektroniki tse matla le lisebelisoa tse tebileng tsa optoelectronic tsa ultraviolet.
Indastering ea photovoltaic, trimethylaluminum le eona e bapala karolo ea bohlokoa. Ka mokhoa oa ho kenngoa ha mouoane oa lik'hemik'hale o ntlafalitsoeng ke plasma (PECVD) kapa ALD, trimethylaluminum e sebelisoa ho theha lera la boleng bo holimo la aluminium oxide (Al2O3). Lera lena la passivation le ka fokotsa tahlehelo ea ho kopana hape holim'a lisele tsa letsatsi tsa kristale tsa silicon, ka hona le ntlafatsa haholo bokhoni ba phetoho ea lisele. Ke e 'ngoe ea lits'ebetso tsa bohlokoa tlhahisong ea lisele tsa letsatsi tse sebetsang hantle haholo.
Ho bonesa bokamoso: Mabone a LED le thepa e tsoetseng pele ea optoelectronic
Indasteri e ntseng e hola ea LED e itšetlehile haholo ka trimethylaluminium le trimethylgallium. Kholo ea LED epitaxial (MOVPE):
* Trimethylaluminum ke selelekela sa bohlokoa bakeng sa ho holisa mekhahlelo ea epitaxial ea semiconductor ea III-V e nang le aluminium joalo ka aluminium gallium nitride (AlGaN), e sebelisetsoang ho etsa li-LED le laser tse tebileng tsa ultraviolet tse sebetsang hantle haholo. E boetse e sebelisetsoa ho beha mekhahlelo ea passivation ea Al2O3 kapa AlN ho ntlafatsa bokhoni ba ho ntša leseli le ts'epo ea lisebelisoa.
*Trimethylgallium (TMG)ke mohloli oa bohlokoa ka ho fetisisa le o hōlileng tsebong oa gallium ts'ebetsong ea MOVPE. Ke selelekela sa mantlha sa ho lokisa mefuta e fapaneng ea li-semiconductor tse nang le gallium, ho kenyeletsoa:
* Gallium Nitride (GaN): Thepa ea motheo bakeng sa li-LED tse putsoa le tse tšoeu, li-laser (LD), le lisebelisoa tsa elektroniki tse matla haholo.
* Gallium arsenide (GaAs): E sebelisoa haholo disebedisweng tsa elektroniki tse lebelo le phahameng, dikarolong tsa maqhubu a seea-le-moea, diseleng tsa letsatsi tse sebetsang hantle haholo sebakeng, le disebedisweng tsa optoelectronic tse haufi le infrared.
* Gallium phosphide (GaP) le gallium antimonide (GaSb): Li bohlokoa haholo masimong a li-LED tse khubelu, tse mosehla le tse tala, li-photodetector, jj.
* Copper Indium Gallium Selenide (CIGS): thepa ea motheo e monyang khanya e sebelisetsoang ho etsa lisele tsa letsatsi tse nang le filimi e tšesaane tse sebetsang hantle haholo.
Bohloeki le botsitso ba trimethylgallium li khetholla ka ho toba boleng ba kristale le thepa ea motlakase/mahlaseli ea lera la epitaxial, e leng se qetellang se ama khanya, botsitso ba maqhubu a leqhubu, le bophelo ba LED. Trimethylgallium e boetse e sebelisoa ho lokisa thepa ea bohlokoa ea filimi e tšesaane joalo ka GaAs, GaN, le GaP, e sebeletsang li-microelectronics le lisebelisoa tse nang le maqhubu a phahameng.
Phepelo ea Chaena: tiisetso ea boleng, botsitso le katleho
Chaena e entse kgatelopele e kgolo lefapheng la dikhase tse ikgethang tsa elektroniki tse hlwekileng haholo le mehlodi ya MO, mme e bontshitse melemo e matla ya tlholisano phepelong ya trimethylaluminium le trimethylgallium:
1. Ts'ebetso ea ho hloekisa e tsoetseng pele: Likhamphani tse etellang pele malapeng li na le boiphihlelo bo tsoetseng pele ba ho qhibilihisa ka mokhoa o tsoelang pele, ho monya metsi, tlhoekiso ea mocheso o tlase le mahlale a mang, 'me li ka hlahisa trimethylaluminum le trimethylgallium tse hloekileng haholo tsa 6N (99.9999%) le tse holimo ka mokhoa o tsitsitseng, li laola litšila tsa tšepe ka tieo (tse kang Na, K, Fe, Cu, Zn), litšila tse nang le oksijene (tse kang li-hydrocarbon tse nang le oksijene) le litšila tsa tlhaho (tse kang ethylaluminum, dimethylaluminum hydride), 'me li fihlela ka botlalo litlhoko tse thata tsa kholo ea semiconductor le LED epitaxial.
2. Phepelo e tsitsitseng le e leka-lekaneng: Tšehetso e felletseng ea ketane ea indasteri le bokhoni ba tlhahiso bo ntseng bo hola bo netefatsa phepelo e kholo, e tsitsitseng le e tšepahalang ea trimethylaluminum le trimethylgallium 'marakeng oa lefats'e, e hanela likotsi tsa ketane ea phepelo ka katleho.
3. Melemo ea litšenyehelo le katleho: Tlhahiso ea lehae e fokotsa litšenyehelo ka kakaretso haholo (ho kenyeletsoa le thepa ea thepa, litefiso, jj.) ha ka nako e ts'oanang e fana ka tšehetso le lits'ebeletso tsa tekheniki tse tenyetsehang le tse arabelang haholoanyane.
4. Tswelopele e susumetswang ke boqapi: Dikhamphani tsa China di tswela pele ho tsetela dipatlisisong le ntshetsopeleng, di ntlafatsa ka mehla mekgwa ya tlhahiso ya trimethylaluminium le trimethylgallium, di ntlafatsa boleng ba sehlahiswa le tshebetso ya tshebediso, mme di ntshetsa pele ka mafolofolo ditlhaloso tse ntjha tsa dihlahiswa tse fihlelang ditlhoko tsa mahlale a moloko o latelang (jwalo ka Micro-LED, di-node semiconductors tse tswetseng pele haholo, le disele tsa letsatsi tse nang le bokgoni bo phahameng ba ho bokellana).
Qetello
Jwalo ka "dijini tsa thepa" tsa diindasteri tsa theknoloji e hodimo tsa sejwalejwale, trimethylaluminum le trimethylgallium di bapala karolo e ke keng ya nkeloa sebaka masimong a catalytic polymerization, di-chip tsa semiconductor, photovoltaics e sebetsang hantle haholo, le di-optoelectronic tse tswetseng pele (LED/LD). Ho kgetha trimethylaluminum le trimethylgallium tse tswang Chaena ha se feela ho kgetha dihlahiswa tse hlwekileng haholo tse fihlelang maemo a hodimo a lefatshe, empa hape ke ho kgetha molekane wa mawa ya nang le ditiisetso tse matla tsa bokgoni ba tlhahiso, bokgoni bo tswelang pele ba boqapi, le bokgoni bo sebetsang ba karabelo ya tshebeletso. Amohela trimethylaluminum le trimethylgallium tse entsweng Chaena, ho matlafatsa ntlafatso ya diindasteri mmoho, le ho kganna moedi wa theknoloji wa nakong e tlang!