Trimethylaluminum (TMAI)
Trimethylalumane (TMAI)
| Mantsoe a tšoanang | Trimethylaluminum, Aluminium Trimethyl, Aluminium Trimethanide, TMA, TMAL, AlMe3, Ziegler-Natta Catalyst, Trimethyl-, Trimethylalane. |
| Nomoro ea Chelete | 75-24-1 |
| Foromo ea lik'hemik'hale | C6H18Al2 |
| Boima ba molar | 144.17 g/mol, 72.09 g/mol (C3H9Al) |
| Ponahalo | Mokelikeli o se nang 'mala |
| Botenya | 0.752 g/cm3 |
| Sebaka sa ho qhibiliha | 15℃ (59 ℉; 288K) |
| Sebaka sa ho belisa | 125--130℃ (257--266 ℉, 398--403K) |
| Ho qhibiliha ha metsi | Likarabo |
| Khatello ea mouoane | 1.2 kPa (20℃), 9.24 kPa (60℃) |
| Ho thibana ha | 1.12 cP (20℃), 0.9 cP (30℃) |
Trimethylaluminum (TMal), e le mohlodi wa tshepe-organic (MO), e sebediswa haholo indastering ya semiconductor mme e sebetsa e le selelekela sa bohlokwa sa ho bewa ha atomic layer (ALD), ho bewa ha mouoane wa dikhemikhale (CVD), le ho bewa ha mouwane wa dikhemikhale tsa tshepe-organic (MOCVD). E sebediswa ho lokisa difilimi tse nang le aluminium e hlwekileng haholo, tse kang aluminium oxide le aluminium nitride. Ho feta moo, TAl e fumana tshebediso e pharaletseng e le catalyst le moemedi wa yona ya thusang ho etseng ha dikhemikhale le dikarabelong tsa polymerization.
Trimethylaluminum (TMAI) e sebetsa e le selelekela sa ho beoa ha aluminium oxide mme e sebetsa e le catalyst ea Ziegler-Natta. Hape ke selelekela sa aluminium se sebelisoang haholo tlhahisong ea epitaxy ea mouoane oa tšepe-organic (MOVPE). Ho feta moo, TMAI e sebetsa e le moemeli oa methylation 'me hangata e lokolloa ho tsoa liroketeng tse nang le molumo e le sesupa-tsela sa ho ithuta mekhoa ea moea o holimo sepakapakeng.
Tlhaloso ea khoebo ea 99.9999% Trimethylaluminium - Silicon e tlase le oksijene e tlase (6N TAMI-Low Si le Low Ox)
| Karolo | Sephetho | Tlhaloso | Karolo | Sephetho | Tlhaloso | Karolo | Sephetho | Tlhaloso |
| Ag | ND | <0.03 | Cr | ND | <0.02 | S | ND | <0.05 |
| As | ND | <0.03 | Cu | ND | <0.02 | Sb | ND | <0.05 |
| Au | ND | <0.02 | Fe | ND | <0.04 | Si | ND | ≤0.003 |
| B | ND | <0.03 | Ge | ND | <0.05 | Sn | ND | <0.05 |
| Ba | ND | <0.02 | Hg | ND | <0.03 | Sr | ND | <0.03 |
| Be | ND | <0.02 | La | ND | <0.02 | Ti | ND | <0.05 |
| Bi | ND | <0.03 | Mg | ND | <0.02 | V | ND | <0.03 |
| Ca | ND | <0.03 | Mn | ND | <0.03 | Zn | ND | <0.05 |
| Cd | ND | <0.02 | Ni | ND | <0.03 | |||
| Co | ND | <0.02 | Pb | ND | <0.03 |
Hlokomela:
Ka holim'a tsohle, boleng ba PPM ka boima ba tšepe, 'me ND = ha ea fumanoa
Mokhoa oa Tlhahlobo: ICP-OES/ICP-MS
Liphetho tsa FT-NMR (LOD bakeng sa litšila tsa FT-NMR tsa tlhaho le tse nang le oksijene ke 0.1ppm):
Tiisetso ea oksijene <0.2 ppm (E lekantsoe ka FT-NMR)
1. Ha ho na litšila tsa tlhaho tse fumanoeng
2. Ha ho na litšila tse nang le oksijene tse fumanoeng
Trimethylaluminum (TMAI) e sebelisetsoa eng?
Trimethylaluminum (TMA)- Likopo le Litšebeliso
Trimethylaluminum (TMA) ke motsoako oa organoaluminium o hloekileng haholo o sebetsang e le selelekela sa bohlokoa makaleng a mang a tsoetseng pele ka ho fetisisa a tlhahiso. Katleho ea eona e ikhethang le khatello ea mouoane li etsa hore e be thepa e khethiloeng bakeng sa ho beha lifilimi tse nepahetseng tse nang le aluminium mahlaleng a elektroniki le a matla, hammoho le karolo ea motheo tlhahisong ea polyolefin.
TMA ea rona e entsoe ka litekanyetso tse thata ka ho fetisisa tsa bohloeki, ka taolo e matla holim'a litšila tsa motheo, tse nang le oksijene le tsa tlhaho ho netefatsa ts'ebetso e ntle lits'ebetsong tsa hau tse hlokang boiteko bo boholo.
Likopo tsa mantlha le Liindasteri:
1. Tlhahiso ea Semiconductor le Microelectronics
Indastering ea semiconductor, TMA ke ea bohlokoa bakeng sa ho beha lifilimi tse tšesaane tse nang le ho nepahala ha athomo.
* Dielectrics tse nang le k e phahameng: Li sebelisoa ho Atomic Layer Deposition (ALD) le Chemical Vapor Deposition (CVD) ho holisa lifilimi tse tšesaane tsa aluminium oxide (Al₂O₃), tse sebetsang e le dielectrics tse nang le k e phahameng ho li-transistors tse tsoetseng pele le lisebelisoa tsa memori.
* Li-Semiconductor tse Kopantsoeng: Mohloli o ratoang oa aluminium ho Metalorganic Vapor Phase Epitaxy (MOVPE) bakeng sa ho holisa li-semiconductor tse kopaneng tsa III-V tse sebetsang hantle. Lisebelisoa tsena li bohlokoa bakeng sa:
* Lisebelisoa tsa Elektroniki tse nang le maqhubu a phahameng: (mohlala, AlGaAs, AlInGaP)
* Lisebelisoa tsa Optoelectronics: (mohlala, AlGaN, AlInGaN)
2. Matla a Hloekileng le Li-photovoltaic
TMA e nolofalletsa bokgoni bo phahameng le ho tshwarella ditheknolojing tsa matla a letsatsi.
* Mealo ea ho Fetisa ka Holimo: Lifilimi tsa aluminium oxide (Al₂O₃) tse tsoang ho TMA li fana ka ho fetisa ka holimo holimo bakeng sa lisele tsa letsatsi tsa kristale tsa silicon. Sena se fokotsa haholo ho kopana ha bajari ba tjhaja, e leng se lebisang ho melemo e meholo katlehong ea phetoho ea sele le botsitso ba nako e telele.
3. Mabone a Tsoetseng Pele le Pontšo (LED)
Tlhahiso ea li-LED tse khanyang haholo le tse bolokang matla e itšetlehile ka TMA e hloekileng haholo.
* Epitaxy ea LED: E sebetsa e le selelekela sa aluminium ho li-reactor tsa MOVPE ho holisa likarolo tse sebetsang (mohlala, AlGaN) ka mabone a LED a maputsoa, a matala le a ultraviolet.
* Passivation ea Sesebelisoa: E sebelisoa ho boloka lifilimi tse sireletsang tsa aluminium oxide kapa aluminium nitride tse ntlafatsang katleho ea ho ntša optical le ho lelefatsa nako ea ts'ebetso ea lisebelisoa tsa LED.
4. Tlhahiso ea Catalysis ea Liindasteri le Polymer
Bohlokoa ba indasteri ba TMA bo thehiloe karolong ea eona ho catalysis.
* Polyolefin Catalysis: Ke thepa ea mantlha ea ho qala bakeng sa ho kopanya Methylaluminoxane (MAO), e leng sesebelisoa sa bohlokoa sa ho kopanya litsamaiso tsa Ziegler-Natta le metallocene catalyst. Litsamaiso tsena li hlahisa boholo ba polasetiki ea polyethylene le polypropylene lefatšeng.
Litšobotsi tsa Bohlokoa le Melemo:
* Bohloeki bo Phahameng ka ho Fetisisa: E laoloa ka hloko ho fokotsa litšila tse senyang ts'ebetso ea elektroniki le ts'ebetso ea ho kopanya lintho.
* Selelekela se Phahameng: Se fana ka ho feto-fetoha ho hoholo, botsitso ba mocheso, le litšobotsi tse hloekileng tsa ho bola bakeng sa ho boloka filimi ea boleng bo holimo.
* Maemo a Indasteri: Mohloli o thehiloeng le o tšepahalang oa aluminium bakeng sa lits'ebetso tsa MOVPE, ALD, le CVD ho pholletsa le lits'ebeletso tsa lefats'e tsa R&D le tsa tlhahiso.
* Motheo oa Lipolasitiki: Thepa ea bohlokoa e tala e nolofalletsang tlhahiso ea lipolasitiki tsa polyolefin tse feto-fetohang le tsa bohlokoa.
Tlhokomeliso: Trimethylaluminium ke thepa e nang le pyrophoric le mongobo e hlokang mekhoa e khethehileng ea ho sebetsana le eona le polokeho. Tlhahisoleseling e fanoeng ke ea merero e hlalosang. Ke boikarabello ba mosebelisi ho sebetsana le thepa ena ho latela litataiso tsohle tse sebetsang tsa polokeho le ho fumana hore na e loketse ts'ebeliso e itseng.
